Research on positioning control of the precision positioning system of the grating ruling machine

The control and experiment research of the precision positioning system of the grating ruling machine were presented. Considering the non-linearity and time-variation characteristics of the precision positioning system, PID feedback control based on BP neural network was utilized in the positioning system. With the functions of self-learning，the parameters of the PID controller were adjusted in real time, and precision positioning could be realize by the PID controller. Experimental result shows that a positioning accuracy within 5 nm was achieved.